Plasma environment

Plasma can be largely divided according to the gas that produces plasma and the type of plasma to be used.
Gas can be mainly divided into oxygen and fluorine systems, and types can be divided into radicals with chemical properties and ions with physical properties.
Plasma ions and radicals have an effect on O-RING, providing a variety of materials to maintain Etch and sealing performance.

TranVa 9671 = Minimize generation of metal ions with balanced resistance to plasma